EQUIINTENSITIES OF RF PLASMA DISCHARGES
R. Vaculík, A.Brablec and V. Kapička
Department of Physical Electronics, Faculty of Science,
Masaryk University, Kotlářská 2, 611 37 Brno, Czech Republic
The subsonic plasma jet burning in a simple nozzle with inner diameter of 1 mm under
reduced pressure (400 Pa) and power supply 150 W. One can observe sharp changes of the
temperature in the end of discharge channel and a cold place in front of the nozzle.
RF argon discharge burning in the injection needle with inner diameter 0,6 mm under
atmospheric pressure and at 100 W power supply. The needle is situated in
the water liquid. Temperature of neutral particles at the end of discharge channel for the cold
is 300 K .
RF argon discharge burning in the injection needle with inner diameter 0,6 mm under
atmospheric pressure and at 200 W power supply. The needle is situated in
the water liquid. Temperature of neutral particles at the end of discharge channel for the cold
plasma is 600 - 800 K.
The subsonic plasma jet burning in a simple nozzle with inner diameter of 1,3 mm under reduced pressure (200 Pa) and power supply 200 W.