Mgr. Matej Fekete, Ph.D.
Researcher I, Deposition of Thin films and Nanostructures
Correspondence Address:
Kotlářská 267/2, 611 37 Brno
Publications
Total number of publications: 43
2019
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Titanium Atom and Ion Number Density Evolution in Reactive HiPIMS with Oxygen‚ Nitrogen and Acetylene Gas
Year: 2019, type: Conference abstract
2018
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Effect of magnetic field on spoke behaviour in HiPIMS plasma
Journal of physics D: Applied physics, year: 2018, volume: 51, edition: 9, DOI
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Influence of chemical composition on structure and mechanical properties of W-B-C coating deposited in industrial sputtering system
Year: 2018, type: Conference abstract
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Space-resolved evolution of sputtered species number densities in HiPIMS and DCMS discharge
Year: 2018, type: Conference abstract
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Titanium Atom and Ion Number Density Evolution in Reactive High Power Impulse Magnetron Sputtering
Year: 2018, type: Conference abstract
2017
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Evolution of sputtered species densities in HiPIMS process with acetylene gas
Year: 2017, type: Conference abstract
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Evolution of Titanium Atom and Ion Density in Reactive HiPIMS - Impact on Hysteresis Curve Shape
Year: 2017, type: Conference abstract
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Impact of Sputtered Species Ionization on Hysteresis Curve Shape – Model and Experiment
Year: 2017, type: Conference abstract
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Spokes occurrence in HiPIMS discharge at different magnetic field strengths
Year: 2017, type: Conference abstract
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Temporal evolution of Ti sputtered species number densities in multi-pulse HiPIMS process
Year: 2017, type: Conference abstract