Project information
Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
- Project Identification
- MSM0021622411
- Project Period
- 1/2005 - 12/2011
- Investor / Pogramme / Project type
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Ministry of Education, Youth and Sports of the CR
- Research Intents
- MU Faculty or unit
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Faculty of Science
- prof. RNDr. Jan Janča, DrSc.
- Other MU Faculty/Unit
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Central European Institute of Technology
- Keywords
- Plasma chemistry, plasma surface treatment, plasma deposition, plasma polymerisation, hard and supra hard coatings,diamond and diamond-like, plasma diagnostics,thin films, spectral plasma sources, low temperature plasma metallurgy, reaction rates of chemi
Study of kinetics of plasmachemical processes by optical, mass-spectrometry and microwave diagnostics. Research and methods of plasmachemical deposition of polymer, superhard, nanocomposite, semipermeable, semisorption and protective thin films. Study of optical, mechanical, chemical and electrical properties of prepared thin films. Study of new types of barrier and surface discharges generated at atmospheric pressure and their applications. New technologies of low-temperature plasma powder metallurgy enabling more economical production of W, WC TiC, WTi and chemical catalysts based on these metals. Proposal and construction of plasmachemical reactors. Study of new methods of plasma diagnostics and monitoring of plasmachemical processes. Computer simulation of discharges and processes running in them. Use of different types of plasma for restoration and conservation of historical artefacts and objects of cultural heritage. Use of pulsed rf and mw plasma for destruction and decomposition of pollutants. Study of selected types of hf and laser generated plasma sources for chemical spectral analysis. Study of perspective volume plasmachemical processes with intention to their practical use. Application of modified hf plasma pencil as a surgery hand operating tool.
This project deals with applied research with large part of basic research. Beside of publications of results new technological patents and industrial samples are expected.
Publications
Total number of publications: 753
2006
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Carbon nanostructures synthesis in microwave plasma torch at atmospheric pressure
Book of Abstracts 3rd International conference on microwave chemistry, year: 2006
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Carbon nanotubes deposition by plasma enhanced chemical vapor deposition
Proceedings Electronic devices and systems 2006 IMAPS CS International Conference, year: 2006
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Carbon nanotubes synthesis in microwave plasma torch at atmospheric pressure
MATERIALS SCIENCE AND ENGINEERING: C, year: 2006, volume: 26, edition: 5-7
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Carbon nanotubes synthesized by plasma enhanced CVD: Preparation for measurements of their electrical properties for application in pressure sensor
PROCEEDINGS OF INTERNATIONAL SYMPOSIUM ON COMMUNICATIONS AND INFORMATION TECHNOLOGIES 2006, year: 2006
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Carbon nanotubes synthesized by plasma enhanced CVD: Preparation of measurement of their electrical properties
Czechoslovak Journal of Physics, year: 2006, volume: 56, edition: Suppl 2
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Comparison of evaluating methods of thin films nanohardness
Czechoslovak Journal of Physics, year: 2006, volume: 2006, edition: 56
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Comparison of structure and mechanical properties of SiO2-like films deposited in O2/HMDSO pulsed and continuous plasmas
Surface & coatings technology, year: 2006, volume: 200, edition: 22-23
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Complex study of mechanical properties of a-Si : H and a-SiC : H boron doped films
Journal of Non-Crystalline Solids, year: 2006, volume: 352, edition: 9-20
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DAS VERFAHREN ZUR ERZEUGUNG EINER PHYSIKALISCH UND CHEMISCH AKTIVEN UMGEBUNG DURCH EINEN PLASMASTRAHL UND PLASMASTRAHL DAZU
Publisher: Evropský patentový úřad, state: Germany, patent's number: DE 69926356, year: 2006
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Deposition and Characterisation of Nanostructured silicon-oxide Containing Diamond-like Carbon Coatings
7th International Balkan Workshop on Applied Physics - Abstracts, year: 2006