Measuring instruments for the practice of the technology of semiconductor devices in clean rooms

Project Identification
Project Period
1/2009 - 12/2009
Investor / Pogramme / Project type
Ministry of Education, Youth and Sports of the CR
MU Faculty or unit
Faculty of Education
Other MU Faculty/Unit
Faculty of Science
clean laboratory, spectrometer, profilometer, measuring instruments

n 2007, the Institute for Condensed Matter Physics Faculty of Science MU put into operation a new laboratory technology of semiconductors, which is conceived as a highly clean rooms for microelectronics. Laboratory is intended primarily for teaching and experimental practice in relation to the theoretical lectures of Physics and Microelectronics, which take place not only at MU (Faculty of Science and Faculty of Education), but also to other cooperating Czech universities. Such a learning laboratory in the Czech Republic was not yet available. Students learn to work in clean rooms and gain practical skills in the preparation of semiconductor devices (resistors, capacitors, diodes) on 100 mm silicon plate silicon process technology (photolithography, oxidation, diffusion, etching, measurements). The aim of the project is to equip laboratory with modern measuring instruments for methods with which the student encounters in their work: the measurement of thickness and profiles of deposited and etched layers using a spectrometer, profilometer and electrical characteristics (V-A and C-V) of produced components.

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