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New procedures for thin film deposition by reaktive magnetron sputtering

Project Identification
MEB020761
Project Period
1/2008 - 12/2008
Investor / Pogramme / Project type
Ministry of Education, Youth and Sports of the CR
MU Faculty or unit
Faculty of Science
Keywords
reactive magnetron sputtering, PVD

Main goal of this cooperation is to develop powerfull diagnostics methods suitable for controling of physical processes taking place in PVD reactor.