Mgr. Peter Klein, Ph.D.

Výzkumný pracovník II, Deposition of Thin films and Nanostructures

correspondence Address:
Kotlářská 267/2, 611 37 Brno

e‑mail:

social and academic networks:

Basic information

Type

Total number of publications: 93

2013

ON SPUTTERED PARTICLE DISTRIBUTION TOWARDS SUBSTRATE DURING TARGET EROSION - SIMULATION AND EXPERIMENT

KLEIN Peter VAŠINA Petr SCHMIDTOVÁ Tereza

Conference abstract

Year: 2013, type: Conference abstract

2012

Feedback system to control reactive magnetron sputtering

KLEIN Peter VAŠINA Petr SCHMIDTOVÁ Tereza

Article in Proceedings

Potential and Applications of Surface Nanothreatment of Polymers and Glass, year: 2012
Monitoring and control of RF driven PVD, PECVD and etching plasmas using Fourier components of discharge voltages

VAŠINA Petr DVOŘÁK Pavel ŽEMLIČKA Radek KLEIN Peter BURŠÍKOVÁ Vilma

Conference abstract

Year: 2012, type: Conference abstract